The vacuum chamber cavity is professionally designed, and all surfaces are specially treated after processing.
The door closing process is protected by a grating.
The vacuum chamber has a quick joint to connect to the workpiece, which is convenient for workpiece loading and unloading
Vacuum and Leak Detection
The vacuum unit includes a vacuum chamber evacuation pump, a workpiece evacuation pump, a vacuum gauge, a valve, and a pipeline.
The leak detection unit includes a leak detector, standard leaks, valves and piping.
Adopts to U.S. Agilent Leak Detector.
Helium Charge and Recovery
The helium refilling recovery unit mainly includes a high-pressure tank, a buffer tank, a helium pressurization and recovery device, and various types of valves, which are connected by pipes. Helium can be filled into workpiece and recovered within a set time.
Helium pressurization and recovery using pneumatic pumps for oil-free recovery;
The system has concentration monitoring and automatic helium gas replenishment function. When the system detects that the concentration of helium is lower than the set value, the system can emit an audible and visual alarm signal to prompt the operator to adjust the concentration. If the system's helium pressure is insufficient, the fill valve is automatically opened to replenish fresh helium.
Helium recovery rate>95%